How to add HZO as an Oxide gate in Silvaco TCAD?

24 January 2023 1 9K Report

I am trying to simulate a Gate-All-Around FET in Silvaco TCAD for my thesis but I can't figure out how to add HZO (Hf0.5Zr0.5O2). I would really appreciate it if anyone could help me with the code for HZO or help me in any other way.

Thank you.

Shikhar Gupta

Md Mehedi Hassan

replace the dielectric constant of SiO2 with that of HZO

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