Hello, I'd like to use UV to modify the surface with HMDS applied, but I have a few questions.
1. I'd like to know the surface modification wavelength band that HMDS responds to (I heard it's from 172nm to 185nm, is that right?) : Let me know if you have any data related to this!
2. I'm trying to get UV to modify the surface where HMDS is applied, is it okay to use UV/O3 treatment?
3. I want to know the difference between UV/O3 treatment and excimer lamp besides ozone generation.