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Questions related from Hyowon Jang
It was confirmed that the uniformity of the thin film increases when the solution precursor is aged and deposited. By the way, what happens if the precursor is over-aged?
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I would like to conduct experiments with Ar plasma treatment using RIE equipment instead of Ar plasma cleaner . What is the typical equipment pressure and power for Ar plasma cleaner
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Does aging increase the particle size of the precursor, and by what mechanism? Does the increase in grain size of the precursor eliminate pinholes during film formation, and if so, why?
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