Adhesion Promoter for Ebeam Resist ZEP520A on Si wafer other than HMDS?

Sudipta Biswas @Sudipta-Biswas

13 April 2023 1 9K Report

We don't have HMDS vapor priming, unfortunately.

Is there any other Ebeam resist adhesion promoter that can be used by spin-coating onto the substrate?

Robb Engle

I have seen Adhesion promotor AR 300-80 new.

From this company: Allresist

Gesellschaft für chemische Produkte zur Mikrostrukturierung mbH

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