Standard method includes PEC, but that seems to leave things such as whiskers on microdisk occasionally, and the surface can also be quite rough, does anyone know of a better way to perform an etch?
First of all you can etch These layers by plasma, wet and even by Ion Milling depending on ( what you look for &) the Layer thickness to etch and the surface crystallographic plan to be etched...
Yes Nurhan, why not laser ablation for small areas; for whole Wafer plasma is Interesting. Concerning Wet etching: H3PO4 can be a solution except if you want to etch the "c" plan.