Mohamed Boufnichel

3 Questions 35 Answers 0 Followers

Questions related from Mohamed Boufnichel

Metallic contamination revealed by PolySi LPCVD: did you get this contamination signature?

During Polysilicon LPCVD deposition, some protrusions or polysilicon horns appeared at the Silicon wafer surface. Does someone have some data on this, that is to say some article on this phenomena...

15 December 2016 6,152 2 View

Has someone already evaluated a plasma process/a plasma chemistry to remove few 100s microns from Si substrate?

Silicon substrate plasma planarization

29 January 2014 3,347 1 View

Can anyone suggest me a chemistry mixture in order to reach perfectly anisotropic profile during the plasma etching of a 10µm thick polymer layer?

The aspect ratio should be higher than 3.

16 January 2014 2,017 3 View