I am depositing SnO2 thin film using spray pyrolysis in ITO glass. The resistance of ITO is about 15 ohm. When I deposit the film, the resistance between the upper surface and film and the lower level as the ITO sheet gives minimum change in resistance (about 8 ohm) and so it seems like it has shorted. Probably the film is very thin or the film altogether has not deposited. So how do I determine whether the film is deposited or not and if so what should be the difference in resistance?

Thank you

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