Has anyone already achieved a high/medium aspect ratio (~10) on silicon using the Bosch - RIA method, but using CF4 instead of C4F8?

Rafael Resende Assis Silva @Rafael-Silva-96

14 April 2023 0 4K Report

Hello, has anyone already achieved a high/medium aspect ratio (~10) on silicon, to obtain nanopillars, using the Bosch - RIA method, but using CF4 instead of C4F8? I say this because we only have CF4, SF6, O, and Ar gases available. Does anyone have another procedure?

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