Generally, which factor determine the adhesion between a thin film and a substrate?

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Hans-Ulrich Krebs

For RuO2, a thin interrlayer of Cr should be suitable. you should try.

Tobias Deutschmann

If Cr doesn't work, try Ti 5-10 nm

A difference in the thermal expansion coefficient is generally bad, too

Tue Phan

Many thanks for your comments. I am gonna try Ti first cause it is available in our lab.