I am using a Hioki LCR meter for frequency dependent study of thin film. I don't have a bottom electrode in my thin film. I have the film deposited on the glass substrate. Thereafter I have pasted a thin film of Ag paste on the ends of the film. The Probe of the LCR meter is then connected with the Ag paste lining and I am taking my readings for frequency range 1000Hz-100KHz. If anyone can help on whether this will give me some formidable results. And what are the parameters that I need to measure and what are the possible calculations. 

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