Does sputtering with oxygen, like reactive gas, cause magnetron oxidation?

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Benedict Christopher

Hi Araceli Arteaga Jiménez

I think its in your control. You may need to optimize the deposition parameters for

that.

Bryan Stuart

Hi Araceli,

Sputtering Titanium in the presence of Oxygen is a standard method for producing TiO2 thin films. Your question is a strange one, reactive sputtering using magnetrons has been carried out for decades with no issues of magnet oxidation. Firstly the magnetrons are not in the vacuum, rather they are sealed behind the base plate of the cathode.

Assuming this is the case and you do not have a special cathode configuration you should not worry about this. And if you do for some reason have you magnets open to the vacuum chamber this should still not be an issue.

Best Regards,

Bryan