Araceli Arteaga Jiménez

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Questions related from Araceli Arteaga Jiménez

Sputtering reactive can damage the magnetron?

I'm going to use oxygen as the reaction gas, but I'm worried that it will cause magnetron oxidation

09 January 2019 7,419 3 View

Does sputtering with oxygen, like reactive gas, cause magnetron oxidation?

I want to grow thin films of TiO2 by means of reactive sputtering, the target is of titanium and the gas is a mixture of argon: oxygen. I have the concern that the magnetron may be damaged by...

09 January 2019 7,129 2 View