Determining Projected Range and Straggle from Ion Implantation Profiles (Including Chain Implantation)?

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Mangal S Dhoubhadel

If few parameter are known such as ion implantation energy, ion type, and target substrate you can used widely available freeware software (eg: TRIM/SRIM by: J. Ziegler) to provide the information you are looking.

S.M Masum

How does this change in the case of chain implantation with multiple energies and doses? is there any standard equation or method available to calculate Rp and ΔRp from such profiles?