Thank you Mr. Ankur. helpful suggestions.  

The question is what do you understand by etching? The major assumption for EMPA is....an absolutely flat sample surface in order to prevend a secondary emission of x-rays by backscattered electrons. Here topography reall counts (negatively)!  Therefore, I wouldn't etch at all for EMPA analysis.

Regaring EBSD...it is a rule that the lower the topography the more problems you can get at high tilt angles. On the other hand....what do you prefer? A very flat surface which shows you the deformation of the last preparation...or a gentle topography but you see now (hopefully) the microstructure with no effects from preparation anymore?

Don't worry, in principle any kind of polishing A. Chauhan described above is a combination of mechanical polishing and chemical etching. The lubricant is sometimes so agressive that you have to compensate it a bit by some additives. The major requirement for EBSD is: deliver the correct microstructure which is not affected by your sample preparation. If you still see some artifacts like scratches you can only believe there is no more (like a general impact on your sample surface). The only message: "I could index all!" doesnt say anything! From this follows: better topography than results which are wrong and related to a requirement: "No topography!". It is of minor impact. A chemical etching which generates flat surfaces is even better since you do not have any mechanical influence and deformation of crystals by polishing.

Chemical etching is generally done to distinguish features in the optical microscope. It is not necessary for anything involving electron microscpy. Chemical ethcing probably will be counter productive for you.

Chemical etching that is subsequently removed by a gentle polishing process (vibratory polishing in colloidal silica) would be a good way of removing mechanically deformed material from the surface of sample to get good EBSD patterns. EBSD is very surface sensitive so the mechanically deformed layer of material can have very detrimental effects on the quality of the EBSD pattern.

These days I perform EPMA often in the first I just did mechanical polishing but the EMPA analysis was not so good but after doing vibration polishing results are better so I would suggest you no need to etch the sample just simply after mechanical polishing do the vibratory polishing.