Can someone suggest some finer points that I should employ for depositing thin films using spray pyrolysis setup?

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SAED Image analysis?

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High temperature hydrothermal reactor?

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Francisco Servando Aguirre-Tostado

If you are going to setup the experiment I will suggest to try to deposit your films with the substrate upside down to avoid flaking-off contaminating your sample. Also the design of the nozzle is critical to have an homogeneous film. If you use a cheap ultrasonic nebular take into account that poor control on power and mist droplet size distribution will affect film homogeneity.