I have performed some SEM imaging on a conductive mounted sample which I also had to au/pd coat (10 seconds - so relatively thin coat). I would like to remove the coating and perform nanoindentation on the same areas I analysed on the SEM.
Just look into the below paper, you will get an idea.
But as i know practically, it is difficult to remove completely by retaining the substrate properties intact, since you are interested in micro hardness, ample care should be taken.