Does anyone have the exact dimensions of a SEMI standard notch in a 200mm wafer? I want to build a fixture to place wafers into position as accurately as possible mechanically. Essentially I will have a hole of 200.5mm diameter to fit wafer in and account for diameter variation. To get good rotational position, I want to put a round pin into the fixture for the notch close to the edge of the wafer, so the wafer orientation is accurate. The picture shows the notch detail of the wafer perimeter (red) and the round pin (blue). I need to know the a good combination of dimensions d (pin diameter) and s (distance from wafer edge) to get best rotational alignment. Obviously, the pin should not extend the wafer perimeter, hence d