I was trying to create a layer of AlN from DC megnetron sputtering and I saw arcing in the machine. the arcing is very low when the pressure and power low but when any of these parameters are increased the arcing was increased and I could see Sparks coming out of the gun. Can any one suggest anything which could help me.
(The gun is not cleaned or changed since last year but also it wasn't used until this month.)
It reactive sputtering of Al, or sputtering of AlN target?
If it is reactive sputtering, do you use Argon as carrier gas in addition to N2? It will help.
You can use pulsed DC, with short off-time (4µs, 50kHz) to avoid arcing.
regards,
Emile
In addition to above suggestions, you should make sure your gun's grounding shields are not coated with Al2O3 or AlN like non conducting material. Since you mention that the guns has not been cleaned for a year, any previous Al coating would have been oxidized and worsen the grounding.
Good luck.
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