How to solve the problem that the film obtained by magnetron sputtering on the ternary alloy target A2BC is ABC (not A2BC)?

25 June 2024 0 2K Report

Using magnetron sputtering with an alloy target composed of A:B:C in a 2:1:1 ratio, the resulting thin film composition is A:B:C=1:1:1. How can you achieve a A:B:C=2:1:1 composition? What are some effective solutions?

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