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Questions related from Sumit Shidne
currently i am working on AlN deposition on silicon wafer, i was using DC sputtering but due to arcing effect i switched to RF. since then i tried 3 experiments and in all three of them the...
16 October 2018 9,435 8 View
I was trying to create a layer of AlN from DC megnetron sputtering and I saw arcing in the machine. the arcing is very low when the pressure and power low but when any of these parameters are...
10 October 2018 8,501 2 View
