Although HfO2 and ZrO2 have similar dielectric constants (~30), why is leakage current higher in ZrO2?
Dear Gourav Bhowmik that's a very interesting question. In addition to the expert answer provided by Aparna Sathya Murthy please also have a look at the following very useful review article which might help you in your analysis:
Hf-Based High-κ Dielectrics: A Review
Article Hf-Based High-κ Dielectrics: A Review
This review article has been posted by the authors as public full text on RG. Thus you can freely download it as pdf file. In this paper the history of high-κ materials is reviewed. It also summarizes the latest progress in Hf-based high-κ gate dielectric manufacturing methods. On page 875 the polymorphisms of hafnium dioxide is mentioned. The crystal structure of HfO2 is monoclinic at low temperatures, but the structure changes to tetragonal (t-HfO2) when heated and finally to cubic at high temperatures Good luck with your research and best wishes, Frank Edelmann
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