Why don't proof mass in comsol simulation?

04 April 2015 1 2K Report

We designed a capacitive differential accelerometer in comsol software and then I applied acceleration in one axis and after analyzation proof mass didn't move but just ends of fingers moved. so explain me why?

Arti Arora

What is the value of your proof mass. Uf it is too high and applied acceleration is too less then only fingers will move due to less thickness in comparison to proof mass.

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