Hello,
I want to grow a metal as the top electrode right after growing the dielectric material. Actually, it also works as a capping layer to protect the dielectric from the atmosphere effect. So I have to grow it in PLD chamber right after finishing dielectric deposition.
Please let me know which metals (Pt, or Au, or ...) are the best options (with ref) ? I need to grow it under vacuum otherwise it may destroy the film.
Thanks in advanced.
PLD is a very frustrating technique for growing metal films.
I rather handled the problem in a much simpler way.
It will much simpler to have a feed through into your chamber and accommodate two insulated electrodes and put a filament and evaporate the metal you wish to deposit. Just after depositing your PLD films, make a mechanical arrangement to bring your substrate to come in front of the filament and do thermal evaporation.
K. Sreenivas
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