What is this number means(sentaurus TCAD)??

06 September 2023 1 6K Report

EpitaxySD sd $x0 $x1 $y0 $y1 $h $bhepi $mhepi $thepi $blepi $mlepi $tlepi $Fangle -0.115 0.05.

What is meaning of -0.115, 0.05 in this code? This code is about Nanosheet.

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