I am working with e-beam evaporated Co/TiO2 multilayer thin film on glass substrate. I got a peak at 33 [°2Theta], but I can not identify the element/composition for what I can get this peak.
There is no possibility for the peak (121) in the case of CoO. You have mixed indices. Go through the book and check the nature of miller indices regarding the different kind of system. In the case of TiO2 rutile phase (121) is possible but the 2 theta value would be around 54 degree. If any intermixing is happening then it might be possible. In the case of Co(Ti2O5) an orthorhombic crystal system a peak around 31.123 degree is possible with miller indices (112). In the case of Orthorhombic system we can not say (112) and (121) is same.
When working on XRD spectrum, you can`t just select one peak and search for matching. Thereupon, you have to use XRD library system for identifying material chemical structure even if it`s a composite of two or more materials.
In order to eliminate the debate of single crystal structure that is very difficult to be achieved. It`s worth to mention that, it would have very high intensity.
However, CoO and Co3O4 have peaks in your previously mentioned (2theta) range. But, you have to consider XRD peaks shift that is caused by strain between thin film and substrate as well.