Hi,
I attempted to deposit the SU8-25 resist on the sapphire wafer, but I encountered difficulty in developing the resist, even with exposure energy four times higher than what is mentioned in the datasheet.
chrome-extension://efaidnbmnnnibpcajpcglclefindmkaj/https://kayakuam.com/wp-content/uploads/2019/10/KAM-SU-8-2-25-Datasheet-9.3.20-final.pdf