Hell, I have grown semiconducting film of SiC on four different substrates ( ZrO2, MgO, SiC, and Si) via RF-sputtering at a substrate temperature of 800 °C and found best crystalline film on Si. I have also observed variation in PL properties as a function of substrate. Most importantly, variation in structural properties and PL characteristics follow the same trend, i.e. best crystalline film was found to have highest crystallinity and lowest defect density. Is there be any other interpretation of these findings? Any help is appreciated in advance.