Hi All,

I wish to perform Indium (In) and Lead (Pb) evaporation in two separate substrates of silicon. As In and Pb are toxic and carcinogenic respectively, it must require to clean the thermal evaporator chamber after each thermal deposition process for a safety reason. Hence, it would be much appriciated, if someone can help me with procedures to clean a glass chamber of the thermal evaporator and its internal SS parts.

Thanks in advance.

Vinod

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