What is the best way to estimate mean electron energy and density of microwave plasma?

Nadarajah Manivannan @Nadarajah-Manivannan

05 June 2014 1 3K Report

We are using microwave plasma to deNOx and de SOx. it would be useful to estimate mean electron energy and density so that plasma can be characterized.

Anuraag Misra

use langmuir probe

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