We want to peel off PDMS from the nanostructured Si wafer. In the combination with toluene, FDTS 0,05 wt% does not dissolve completely after mixing for 60 mins at room temperature. Ethanol and methanol are favourable since they do not cause swelling of PDMS.

We tried with methanol, but it had evaporated before 1 wt% of FDTS dissolved . I would truly appreciate if anyone has an idea which FDTS wt% with ethanol and methanol to use? Thank you in advance.