What is meant by "Dynamic pull-in" in MEMS parallel plate electrostatic actuators in detail? What are the causes and effects of it?

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Stephan D A Hannot

Dynamic pull in is not defined as rigourous as 'static' pull-in. Therefore multiple definitions for different pull-in phenomona are called dynamic pull-in. However a common definition is the voltage step required to reach pull-in. This is typically lower than a static pull-in value due to overshoot.

See for instance paragraph 3.3.2 in this document: https://repository.tudelft.nl/islandora/object/uuid:d62f1300-26e7-4e71-8f88-5ee1fb5491fc/datastream/OBJ/download

Hassen Ouakad

The pull-in voltage of an electrically actuated MEMS device can be defined statically or dynamically: In the static case, the pull-in voltage is the threshold DC voltage for which the static equilibrium is stable and bounded. In the dynamic case, it is the highest DC voltage, applied as a step, for which the transient step response is bounded. In the static case the equilibrium curve has to be computed to be able to determine pull-in, whereas the dynamic the pull-in voltage is determined using a trial and error approach.