What are the factors for LiFePO4 thin film depostion when Rf sputtering is used?

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Marcella Bini

You can find many papers that treat this topic, see for example Journal of The Electrochemical Society, 154 8A805-A809 2007. You can simply type LiFePO4 thin films in Google and many papers appear.

Mohsen moradi haji jafan

i dont know.

best regards

Justine Nyarige

Try reading this paper if it can assist

Nanocrystalline mesoporous LiFePO4 thin-films as cathodes for Li-ion microbatteries

Thanks

Vinsensia Ade Sugiawati

Thanks for the fast reply Marcella Bini. I really appreciate it. Actually, last year our labo has tried to deposit LiFePO4 but the result is Li3Fe2(PO4)3. Currently, i'm trying to deposit it on Si substrate. Maybe you have any suggestions for me.

best regards,

Vinsensia

Halo Mohsen, thanks also for reply.

Thanks Justine. I'm going to read it but i see the process used is sol-gel, right? Actually, i'm trying the RF sputtering technique. But, it's useful to make clearly about LiFePO4.

Best regards,