TMAH effect on MgO?

16 December 2020 1 297 Report

Hello everyone,

I use TMAH to remove AlOx (150nm) layer in liftoff processes. I would like to ask if TMAH has some influence on MgO barrier because I have 1.2 nm MgO barrier in my structure and I have some doubts that TMAH may remove MgO since it removes AlOx. I will be so grateful for any hints.

Best regards

Livio Leiva

In my experience a 2.38% solution of TMAH in water (which we use to develop some kinds of electron beam lithography resists) dissolves MgO. However, even for an MgO layer of a few nm, a long time is needed (several tens of minutes). I don't know how long is your lift-off process, but just in case it may be better for you to check with a test MgO layer maybe...

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