Dear all,

When experimentally demonstrating the resolution of an optical microscope by grating samples, should we use the lindewidth or periodicity of the grating to mark the resolution?

For example, a system can clearly probe a grating of 200nm linewidth with 400nm periodicity, can we say the resolution of the system is 200nm, otherwise 400nm? It is actually two times difference.

Looking forwards to your kind reply,

Best regards,

Yi