First thing that you will need is a chamber dedicated to sulphur and since it is corrosive, so your pumping system should be able to handle these materials.

Since you are doing PVD, so why don't u try to make TiO2 doped with S sputtering targets as long as the doping concentration that you want is low, you might be able to get away in an ordinary oxide sputtering system. Annother possibility is to grow TiO2 films and implant sulphur ions inside them. By changing the dosages, you can change the dopant concentrations

Try to add a small amount of tertbutyldisulfide into your vacuum chamber

You can try flash evaporation methods also.

But as already suggested, while depositing sulphur compounds you must be careful.  If you have a glass chamber it is good, you can clean conveniently.

Secondly it contaminates the pumps also. Pl. take care of this and check you oil in the rotary pump especially after some depositions.

K. Sreenivas