Has someone experience with the preparation of TiAlN coatings for EBSD measurements? As there is no availability of FIB, I am searching for a suitable mechanical polishing method?
Okay, a recipe is only for one or the other available preparation device. We have for instance already used ion polishing for EBSD investigations of such materials in an old modified Gatan DuoMill.
https://www.youtube.com/watch?v=6qXkp-F4q28
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