SiOxAl ellipsometer characterization?

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Jose Joseph

The following links may help you.

https://www.ee.washington.edu/research/microtech/cam/SOP/Sputtering/Sputtering%20SOP.doc

http://m.iopscience.iop.org/0960-1317/17/5/029

http://www.sciencedirect.com/science/article/pii/S0042207X98002905

http://www.sciencedirect.com/science/article/pii/S0026269208003649

Jose

Jose-Maria Delgado-Sanchez

Thanks Jose, but I am afraid that neither of those references make a characterization by ellipsometry

Myroslav I. Kozak

I have the Psi-Delta of film Al:SiO2 at lambda=0.63 um

Hi Myroslav... which model do you use to obtain {n,k}? Cauchy? Tauc-Lorentz?