Simulation software for thin film deposition and characterisation.
COMSOL Multiphysics : A general purpose software platform, based on advanced numerical.
Atlas : A 2D and 3D device simulator that performs DC, AC, and transient analysis for silicon, binary, ternary, and quaternary material-based devices. Atlas enables the characterization and optimization of semiconductor devices for a wide range of technologies. Accurately characterizes physics-based devices in 2D or 3D for electrical, optical, and thermal performance without costly split-lot experiments.
Also attaching the link in which I have shown list of simulation softwares available as openware softwares for Thin Film, you can go through and try according to your requirement. Click on the following link.
I don't believe such a software might exist, all the processes (e.g. Sputtering, ALD, CVD, e-beam Evaporation, CBD, SILAR, etc.. etc) are long and chaotic processes, which moreover, involve highly quantum mechanical effects. I don't think there could be a commercial simulation software for these scenarios.
Although, I think it could still be possible to simulate individual parts of some of the mentioned processes. e.g. you can try to simulate, in a simplified manner, the growth of a one dimensional layer of atoms on a substrate at the last stages of the deposition on an e-beam evaporation deposit (when the deposition rate has been maintained constant) for instance, or maybe the reaction rate of a given convenient reaction to form the ionic compound of interest in a Chemical Bath solution, etc .. But I guess the techniques you would have to use are ab initio techniques (the so called first principles), in other words the approaches from solving the Schrödinger Equation, and instead of a specialized simulation software you will have to work with code tailored for your problem.
To study electrochemical depositions, 3 softwares can be used:
COMSOL
PlatingManager or PlatingMaster from ELSYCA company
Castor Elec 3D from CETIM company
In these softwares you can simulate in 3D the current distribution in your electrochemical cell and predict the current density distribution and layer thickness on your part to be plated. I have used ELSYCA Plating for 10 years to optimize electrodeposition processes and I'm very happy with this software but COMSOL or Castor Elec 3D could do the job as well.