I`m using an MA6 Gen4 pro. The light source is LED, i-line(365nm), h-line(405nm), g-line.
I`m trying to use pure i-line radiation. This can be done by putting h-line and g-line intensity emission to 0% in the software menu.
When I perform light calibration with an external UV-Optometer, I get a certain intensity X at 365nm. Despite the h-line set to 0%, the optometer still registers an intensity at 405nm.
For example, I get 365nm=10 mW/cm^2, and 405nm=10.4mW/cm^2.
I`m not sure if this is normal (the detection range of the optometer) or if there is an error with the machine.
For flood exposure, I set h-line emission only (i-line set to 0%). In this case, I get a certain intensity at 405nm and a very small value (^0.1-0.03mW) from the 365nm channel.
For my process, I use an exposure dose of 30mJ/cm^2. The MA uses the 365nm sensor to calibrate this dose.
Based on the above consideration, what is the sample's real dose?
Is it 30mJ/cm^2 or 60mJ/cm^2 including the dose from the h-line channel? (i-line + h-line)
thanks for your time.
regards
PS
The optometer is also given by Suss to calibrate the light.
I`m using image reversal P.resist (AZ5214E). Small doses and longer development time are required for lift-off.
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