Photolithography: What is the real exposure dose in case of emission from a i-line and h-line source?

I`m using an MA6 Gen4 pro. The light source is LED, i-line(365nm), h-line(405nm), g-line. I`m trying to use pure i-line radiation. This can be done by putting h-line and g-line intensity emission...

19 February 2024 3,473 0 View