I am fabricating multi-layer PDMS stamp for nano lithography. Unfortunately I am not able to get good pattern transfer from silicon template after molding on the template.
After fabricating, for SEM observation, I am depositing thin layer of gold/palladium (Au/Pd) . But unfortunately, not able to find any structure.
The voltage i keep 5 keV.
Thanks
I would suggest to perform a profilometer scan (preferably AFM) to see if there is any topography on the PDMS. If not, it might be caused by trapped air. I suggest to cure the PDMS curing under vacuum.
do AFM first then you go to SEM analysis. the curing of PDMS is very important for patterning fabrication.
PDMS is difficult to image with SEM. Even though you coat it with a conductive layer, you'll build up a high charge density inside the PDMS that can distort your image. I find that carbon loading the PDMS when you plan to image with SEM improves image quality.
In order to check the PDMS pattern quality first check the profilometer (in AFM), where u will get clear idea about the surface smoothness after molding. But the PDMS must be cured properly before u do any experiment. Then when u coat with any metal, u have to check the surface profile with AFM, where u can compare before and after coating metal. Surely u will get an idea about that, then u can increase the metal concentration and check.
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