Conductive ITO substrate means it has definite value of conductivity.Measure the conductivity  of sample and subtract the  conductivity value of  ITO.Obtained value  is the real conductivity of sample 

Thank you, sir.. But is there any other way to look into such issue. Since the prepared thin films may be not exactly uniform in thickness and other parameters (roughness, grain size etc.) and hence it will be quite difficult to say in the conductivity or in carrier concentration how much is the contribution due to the substrate and how much due to film.

In that case measure the real conductivity of ITO substrate and  after that  deposit the sample. Then measure the conductivity of sample along with FTO. This procedure may get the conductivity data.Generally commercial FTO is best to deposit the sample where the conductivity data of FTO is known 

deposited your sample on a plane glass slide then find out the conductivity of deposited samples,  

Goutam,

Based on your description, there are 3 aspects to look at your question:

1. the coating that you deposit on ITO, is it metallic (highly conductive); or semiconductive; or insulative.  This will decide whether it is measurable by direct resistance measurement, what kind of meter to use etc.

2. contact, how homogeneous and smooth is the coating, how thick/robust is the coating.  The will help to decide what kind of contact to use on the coating (point probe, or sputter deposit metal contact, or you may use elastic conductive contact).

3. if you hope to find ways that is not direct resistance measurement, then it will depend on your material. Based on the material property of your coating, you may find some ways to give you an answer.

The thin film deposited on ITO is semiconducting in nature. ALso since i am using electrodeosition method hence choice of conducting substrate is required. Now i want to measure the conductivity of film with no effect of substrate. Kindly suggest possible methods assuming deposited film is smooth enough.