Is there any simulation software for RF co-sputtering?

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Mohamed-Mourad Lafifi

Dear Arun Bhaskaran,

You can use LabView, also I suggest you see links on the topic.

Article An upgraded ultra-high vacuum magnetron-sputtering system fo...

Conference Paper Modeling and simulation of reactive magnetron co-sputtering ...

https://mdpi-res.com/d_attachment/energies/energies-14-02122/article_deploy/energies-14-02122-v2.pdf

https://www.frontiersin.org/books/Plant_Evolution_and_Development

Article Memristor devices for neural networks

Best regards

Phil Denby

Hi Arun, I would have thought such a simulation would be extremely complicated, having to take into effect, chemical species in the vacuum, the 3D magnetic field strength of the magnetron, shielding by the target, different sputtering material yields, andode and cathode geometry etc. etc. RF sputtering in practice can be extremely challenging on lab scale and somewhat of a black art, as you have to contend with many changing parameters, one of the most significant is poisoning and build up of material on the target itself. For very large scale applications it might be more meaningful where you have very static operating conditions over long periods of time.