There is a color chart for SiO2 and TiO2 relating the color of the film to the oxide film thickness, is there a similar chart for Al2O3 where you can approximate the thickness of the film by observing the color of the film?
It strongly depends on the crystal size. Perfect single crystals or perfectly oriented films are color-less, even for thick dimensions.
Thanks for the reply, but the films are amorphous with no preferred orientation. You can see globular particles under the SEM but no crystals. In such a scenario, what happens?
finally found a paper which discusses on the color chart for Alumina films:
ELECTROCHEMICAL PROPERTIES OF DIELECTRIC FILMS OF A L U M I N I U M OXIDE DEPOSITED ON SILICON,SAMPURAN -SINGH, Thin solid films, 37 (1976) 453-460.
http://materialweek.fi/file/Kokkola-Material-Week-2013-NanoKokkola-Satu-Ek-Atomic-Layer-Deposition-Thin-Film-Solutions-for-Global-Industries.pdf
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