May anyone tell me how to protect PMMA coating during TMAH etching? Is PMMA soluble in TMAH?
Hi Zsuzsanna,
PMMA is not soluble in TMAH, therefore you can use it without any coating.
For further reference, see this article:
Article Poly (methyl methacrylate) as masking material for microelec...
Dear Pablo,
Thank you for the reference, your answer is very useful.
Most welcome!
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