I would like to know if there are any methods to make thin film of transition metal nitrides transparent. I found just one paper where titanium nitride deposited by CVD was transparent. There are some papers where TiN and ZrN were applied as counterelectrode, but my goal is to replace TCF (for example ITO) with transition metal nitrides. They are conductive so this criteria should be fulfilled, however there is still criteria of transparency (transmittance should be around 0,84). I would like to deposit my thin films with magnetron sputtering. Do You have any recommendations? Thank You for any meritorious answer in advance.

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