Is it be possible to reuse the MOCVD tools that have been used for GaN growth for InGaAsP/InP growth?

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Yong Kim

Muhammad Hamza El-Saba

Dear professor,

I really appreciate your answer. Is there any cleaning procedure? Does it needed to clean with any specific chemicals, for instance, H2SO4+H2O2, Acetone, metanol, IPA and so on. Thank you very much for your assistance.

Ap Chiu

Some company in Taiwan

They can help to do this.

Use G4 HT to growth As/PH3......

Dear Ap Chiu ,

Thank you for your answer.

Do you have any cleaning procedure for G4 HT to growth As/PH3?

The most differences are after exhaust.....

The filter is different from Nitride system......

What is the difference of between InP and Nitride system?

Which reactor ? for reactor parts is easy clean. or Buy new set

But U should modified Ur filter system after pump first......................

SH head system for R&D?

=> I have understood what you mean.

=> What is the difference of between InP and Nitride system in filter system?

We don't know yet which type of system that we will use shower head system or other kind system.

Now we are considering the MOCVD tools for InGaAsP/InP devices.

There are some attached photos of filter that are used Nitride system.

Can you show me the filter for InP system?