I heard that ATR-FTIR can not be used to measure IR spectrum of metal samples.
Yes, that is correct. Pure metal surfaces have 100% reflectance all over the spectrum, tha's why they are used for recording the background in reflectance IR spectroscopy (except ATR).
So if you have a SiO2 film on Al you will see the SiO2 only. It depends on what you want to know about your film: You should consider the penetration depth of the evanescent wave in ATR. With thin films you may suspect reflection on the Al-carrier.
It depends on how the SiO2 film wad deposited onto the surface , what you intend to study? Besides, the depozite thickness should be enough. Surface silanol groups can be investigated with FTIR-ATR.
In my opinion, it is impossible to perform FTIR study for your film deposited on Al-foil but you can perform ATR. I have done number of ATR study of the sample deposited on Al-foil.
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