My software doesn't want expose more than one design on position list and I'd like to know why.
Version of my softwere to do EBL is ELPHY Plus Ver. 5.0 SP 12.1. If I upload, lets say two different design, .gds file, to the position list and then I proceeded to exposure. So even I press 'scan all' or even 'scan endless'. It just stops after first design (first position list). Has anyone a clue what to do in order to solve it?
Hello Szymon Lis,
I use a Raith Pioneer system and not ELPHY but i think both use the same lithography software. My version however is release 6 SP 6.0.
Are you sure that the first position was exposed? Maybe an error occured and it stopped because of that.
Does your version of the Software include the Raith Protocol Tool (run from windows start menu)? If so, what does it say?
Regards
Stefan
Hi Stefan,
Thanks for answering.
Yes I'm sure the first position is correctly exposed (I even developed and all design was transferred correctly). And the same conclusion can be drawn from Log file (I'm not sure it is the same as Raith Protocol Tool, I will check it tomorrow). However in log file, there is entry like: start exposure, then after 5h is another: exposure end. And then there is: end of position list - or something similar. So I think that instead of going to next position, it is jumping to the end of position list. quite weird.
And what is even more bizarre, when I tried do EBL for small designs (let say one that need less then 1 minute to expose) everything was fine. software smoothly goes from one position to another. but when I switched to big one, the one that need 5 hours, it does not work.
OK, I don't know what the problem is, but i suspect it's directly related to the long exposure time. I think five hours is really a lot.
Maybe you run into an internal time limit of the software or the device, but in that case i would expect an entry in the Raith Protocol Tool or a Warning/Error from one of the status report modules. If you don't know what i mean: There's a colored box in the lower right corner of the software window. When everything is fine it is green and says "OK". If an error occured it switches to red and says "ERROR". If you double-click the colored box you can access the error messages. Otherwise it's probably a bug.
I'm sorry that i cannot be of more help.
- Badges
- Science topic
- Similar topics
- Computer Science and Engineering
- Software