I usually clean glass substrates with Acetone, Iso-propyl alcohol, and DI water each for 10 minutes respectively before using it for deposition of thin films.
If you are cleaning glass substrates with Acetone, IPA, DI water for 10 mins each, you are good to deposit films on them. Adding Temperature (50~80C) is a good idea for deep cleaning the substrates, some cases it produces more uniform films on the substrates.
Ideally you can use a detergent such DECOM or other better grade to clean your glass substrates in an ultrasonic bath for 20 mins. And then rinse in DI water. It is much safer and environmentally friendly. Set the temperature at 50 or 60 degree C to give you much better results.
Sonication time is about 20 minutes and a temperature not exceeding 50 degrees is recommended. DI Water is generally preferred as it is eco-friendly and doesn't damage the bin of the ultrasonic cleaner. Many ultrasonic cleaners have an operating manual with them kindly go through the time duration and temperature reach
You can use any glass substrate cleaning solution like acetone, isopropyl alcohol below their boiling points . To get good adhesion, before this ultrasonification glass substrates can be soaked in pirana or aquaragia solution
The standard procedure to clean the glass substrate is
First wash the glass substrate in Acetone. Then wash it in alcohol. And then wash in Double Distilled water. After doing this, you can get a good thin film.
I think that the temperature is unnecessary because the ultrasonic serves the purpose of agitation better than temperature, except if your lab is so cold, but for room temperature like 25° or so I think what you're using is pretty efficient, personally, I would use relatively high temperature (80°) when using distilled or deionized water only in rinsing or cleaning.